JPS62138446U - - Google Patents
Info
- Publication number
- JPS62138446U JPS62138446U JP2692986U JP2692986U JPS62138446U JP S62138446 U JPS62138446 U JP S62138446U JP 2692986 U JP2692986 U JP 2692986U JP 2692986 U JP2692986 U JP 2692986U JP S62138446 U JPS62138446 U JP S62138446U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- light
- receiving sensor
- detection device
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2692986U JPS62138446U (en]) | 1986-02-25 | 1986-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2692986U JPS62138446U (en]) | 1986-02-25 | 1986-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62138446U true JPS62138446U (en]) | 1987-09-01 |
Family
ID=30828484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2692986U Pending JPS62138446U (en]) | 1986-02-25 | 1986-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62138446U (en]) |
-
1986
- 1986-02-25 JP JP2692986U patent/JPS62138446U/ja active Pending